Presenter Full Program · Contributors · Organizations · Search Program · Flagged · Happening NowMore…Search ProgramFlaggedHappening NowSu ZhengThe Chinese University of Hong KongPresentationsResearch ManuscriptFracturing-aware Curvilinear ILT via Circular E-beam Mask WriterDesignDesign for Manufacturability and ReliabilityResearch ManuscriptEMOGen: Enhancing Mask Optimization via Pattern GenerationDesignDesign for Manufacturability and Reliability